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SemiRep Engineering

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Services

MFC/MFM Repair & calibration

MFC/MFM Repair & calibration

MFC/MFM Repair & calibration

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Legacy Line Replacement

MFC/MFM Repair & calibration

MFC/MFM Repair & calibration

Learn more

Authorized Service Center

•  Class 100 Cleanroom (ISO Class 5)                               •  ISO 9001 Certified / ISO 17025 Compliant      

•  NIST Traceable Equipment                                              •  Ultrasonic Cleaning 

•  1 x 10^(-11)atm-cc/sec He Leak Detection                •  24hr Temperature & Pressure Monitoring

•  High Flow Capabilities up to 2500 SLPM                    •  High Purity Calibration Gasses  

•  Semiconductor Protocol                                                   •  Pressure Drop Testing

•  Full Scale Flow up to 2,500 SLPM                                  •  Full Scale Flow as low as 1 SCCM

• MOLBLOC Primary Standards                                         •   Volumetric Primary Standards

Download MFC Service Form (PDF)

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